Objective: To construct a model for a controlled memory (CM) nickel-titanium (NiTi) file and another M-wire NiTi file with the same geometry by using finite element analysis. To evaluate the flexibility of a CM NiTi file by using three dimensional finite element method and to compare its mechanical responses with that M-wire NiTi. Methods: Based on the reverse engineering, the 21 mm long, 25#/08 taper Hyflex NT NiTi file and Hyflex CM NiTi file were fixed by the cantilever bending model at a distance of 9.5 mm from the tip of the file. The mechanical tester’s indenter was loaded/unloaded at a distance of 3 mm from the tip of the file. The maximum displacement was 3 mm, the load displacement curve was obtained. Subsequently, by using a micro-CT to scan (layer spacing of 8 μm) NiTi files, and ABAQUS (6.10) was introduced to construct a geometric model. Hyflex NT was considered as a shape-memory alloy constitutive model, Hyflex CM was considered as a power-hardening plastic constitutive model, respectively. Comparing the load-displacement curve of cantilever bending in the three-dimensional finite element model with the load-displacement curve in the experiment. Results: Two tetrahedral element models were constructed, the total number of nodes was 99 353 and the total number of cells was 63 744. When the loading displacement was 1 mm, the stress distribution of the cross section at 6.1 mm from the tip of the file was observed. The upper and lower surfaces were subjected to the maximum bending stress and entered the phase transformation yield stage. The finite element simulation could clearly show the deformation of the file. Various information such as deformation characteristics and stress distribution in the process were well fitted to the actual experimental curve. Conclusion: The constitutive behavior of the material has a significant effect on the mechanical behavior of NiTi file. The finite element model established for the NiTi file of the CM wire can accurately capture the characteristics of various deformation processes of the NiTi root canal file, and it has a good fit with the actual experimental curve. The finite element model can be used for study on bending properties of CM wire.